U Pin (Patent Process: 103206951)

²  Material: Vespel Polyimide (Polyimide)

²  High-temperature resistant: The highest continuous use temperature of 288 ° C, short-term but also temperature 480 ° C, very low temperature is up to 1K or less may be used.

²  Abrasion resistance: PV value without lubrication is more than 10 times under the general engineering plastics

²  Deformation: even at high temperatures and will not soften, to support high loads at 260 ° C, 180 kg / m² under creep, only 0.6% in the 1000 hours

²  Electrical Insulation: Insulation Resistance 22 kv / mm, plasma resistance, radiation

²    Measuring instruments: optical measurement

² Suitable length than original pin

² Assembly is more tightly than before

² According to Oval-Shape of focus ring to design U Pin

² U Pin bottom designed is more strong to fit E-Chuck

² Improve particle performance than K pin

² Particle Data is steady

² Improve wafer edge particle issue